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GASPOD
Safe storage and supply of toxic and flammable process gases.

Automated gas-cylinder cabinet for semiconductor fabs, energy and research: touch-screen control, EMO, gas-leak / fire / exhaust / door monitoring, up to four 50 L cylinders at 300 bar, Modbus TCP to the fab system.

4 × 50 L · 300 bar
touch-screen · EMO
leak · fire · exhaust · door
Modbus TCP
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L3 · systemGASPOD
Tremon GASPOD
Specifications

Typical values from the datasheet; accuracy applies under the datasheet's reference conditions. Where a value depends on the application it is specified per project and fixed in the order confirmation.

purposesafe storage & supply of inert · flammable · toxic gases
usesemiconductor fab · energy · research
controlTouch-Screen ≥10″ · EMO · status column
safetygas-leak · fire · exhaust · door monitoring
interfaceModbus TCP (Ethernet) · discrete I/O
buildIP54 · 2550×610×610 mm · up to 4 × 50 L · 300 bar
Downloads

Open links — no form.

DocumentFileType
Datasheettremon-gaspod-datasheet.pdfPDF · 4 MB
Applications and the rule behind each
  • Semiconductor fab gas supply (silane, arsine, phosphine families — via GDC detection)
  • Research and pilot plants with toxic gases
  • Energy: hydrogen and process-gas cylinder storage
Gases

Each gas has a reference page with limits, IR band and monitoring practice.

Certificates and compliance

Status words as on the datasheet: certified · pending · application dependent.

CEcertified
IP54certified
SEMI S2 / fab requirementsapplication dependent
How you get it
1
gases · cylinder count · fab interface
2
system design & quote
3
FAT · delivery
4
commissioning · safety-function tests
FAQ
Which gases?
Inert, flammable and toxic process gases in up to four 50 L cylinders at 300 bar; gas-specific panels per cylinder.
Fab integration?
Modbus TCP (Ethernet) and discrete I/O to the fab monitoring system; EMO and status column on the cabinet.
Safety functions?
Gas-leak, fire, exhaust and door monitoring with interlocks — tested at FAT and commissioning.
Get a quote

Tell us what you measure — just tap

Three taps and an email. An engineer replies within 24 h with feasibility and a price indication.

1 · Which gas?
2 · What for?
3 · What form?
4 · Where do we reply?
Goes to sales@tremon.nl. No newsletter, no tracking.
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