Identifiers for search
| Name | Tetrafluoromethane (PFC-14) |
| Formula | CF₄ |
| IUPAC name | tetrafluoromethane |
| CAS number | 75-73-0 |
| EC number | 200-896-5 |
| UN number | 1982 — Tetrafluoromethane |
| Transport class (ADR/RID) | 2.2 (Non-flammable, non-toxic gases) |
| PubChem CID | 6393 |
| Synonyms | — |
Physical & chemical properties
| Molar mass | 88.01 g/mol |
| Boiling point (1 atm) | -128 °C |
| Melting point | -184 °C |
| Critical temperature | -45.6 °C |
| Critical pressure | 37.4 bar |
| Vapour pressure | — |
| Gas density | 3.946 kg/m³ (0 °C, 1013 mbar) |
| Relative density (air = 1) | 3.052 |
| Solubility in water | 5,7 ml/l at 20 °C |
| Appearance | gas liquefied under pressure, colourless, odourless |
| Odour | odourless |
| 1 ppm at 20 °C | 3.66 mg/m³ |
Behaviour with temperature and pressure
Boiling point -128 °C at 1 atm: a gas at all normal conditions. Critical point -45.6 °C / 37.4 bar: above this temperature it cannot be liquefied by pressure alone — cylinders hold a compressed gas. Relative density 3.052 (air = 1): heavier than air — accumulates in pits, cable basements and at floor level; place sensors low. Conversion at 20 °C, 1013 mbar: 1 ppm = 3.66 mg/m³; NDIR reads partial pressure, so readings scale with absolute pressure (value = reading × P/1013) and must be pressure-compensated.
// Non-combustible gas., Only slightly soluble in water., Gas is heavier than air., Danger of suffocation at high concentrations due to oxygen displacement.
Hazards & safety
NFPA 704
health · flammability · instability · special
GHS / CLP pictograms
| Hazard class | asphyxiant; greenhouse gas (PFC, lifetime 50 000 yr) |
| GHS signal word | Warning |
| CLP classification | Gases under pressure, liquefied gas; H280 |
| Hazard statements | H280: Contains gas under pressure; may explode if heated. |
| Lower / upper explosion limit | non-flammable |
| Auto-ignition temperature | — |
| Seveso III named substance | no |
Exposure limits
| EU indicative OELV (8 h TWA) | no EU IOELV |
| EU IOELV short-term (15 min) | — |
| Germany AGW (TRGS 900) | — |
| Netherlands | wettelijke grenswaarde per Arboregeling bijlage XIII — SER grenswaarden database |
| NIOSH REL (USA) | — |
| OSHA PEL (USA) | — |
| IDLH | — |
// Limits change: always confirm the current national value before setting an alarm. Values above were read from the EU directives / GESTIS / NIOSH pages listed in Sources.
Effect on people
Inert, non-toxic simple asphyxiant; heavier than air. Extreme atmospheric persistence (50 000 years) is the reason for control, not acute toxicity.
GESTIS main toxic effects: Acute effects:
Frostbite after contact with liquefied R 14,
suffocation due to oxygen displacement;
Chronic effects:
No information available
Recommended monitoring
- NDIR (7.8 µm) for semiconductor fab exhaust and PFC abatement efficiency (DRE) measurement; FTIR/QMS in the lab.
- No OEL of concern (inert); monitored for emissions reporting (ETS/IED) not for health.
Climate & atmosphere
| GWP₁₀₀ — IPCC AR6 | 7380 |
| GWP₁₀₀ — IPCC AR4 | 7390 |
| GWP used in Reg. (EU) 2024/573 | 7380 |
| Atmospheric lifetime | 50000 years |
| Ozone depletion potential | 0 |
| Main IR absorption band (NDIR) | 7.8 µm (ν₃ C–F stretch, 1283 cm⁻¹) — very strong |
Regulation windows
- F-gas 2024/573 Annex I (PFC-14, GWP 7380) — semiconductor PFC reporting; EU ETS / IED emissions reporting
- No OEL of concern
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Other gases
Sources
- https://gestis-database.dguv.de/data?name=040030
- https://pubchem.ncbi.nlm.nih.gov/compound/6393
- IPCC AR6 WG1 Ch.7 Supplementary Material, Table 7.SM.7 (https://www.ipcc.ch/report/ar6/wg1/downloads/report/IPCC_AR6_WGI_Chapter07_SM.pdf)
- IPCC AR4 WG1 Ch.2, Table 2.14 (https://www.ipcc.ch/site/assets/uploads/2018/02/ar4-wg1-chapter2-1.pdf)
- Regulation (EU) 2024/573, Annex I/III (https://eur-lex.europa.eu/eli/reg/2024/573/oj)
- HITRAN/NIST IR band positions (approximate centre of the strongest band used for NDIR; https://hitran.org, https://webbook.nist.gov)
// Data compiled 2026-09-17 from the listed primary sources; null values were left blank rather than estimated.